Unveiling the multifaceted impact of C2H2 flow on SiCN CVD coatings: Mechanical mastery and beyond
Dhruva Kumar, Soham Das, Bibhu P. Swain, Spandan Guha
Topics & Concepts
CrystallinityMaterials scienceNanoindentationThin filmSurface roughnessChemical vapor depositionCrystalliteAnalytical Chemistry (journal)Volumetric flow rateElastic modulusComposite materialNanotechnologyMetallurgyChemistryOrganic chemistryPhysicsQuantum mechanicsDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesisSemiconductor materials and devices