Study of the methane flow influence in the micro-tribology behavior of DLC coatings deposited by PECVD: a Raman analysis
César D. Rivera-Tello, Francisco Javier Flores‐Ruiz, M. Flores, O. Jiménez, I. Farías, J. Oseguera
Topics & Concepts
Materials scienceRaman spectroscopyTribologyMethanePlasma-enhanced chemical vapor depositionCoatingChemical vapor depositionComposite materialDeposition (geology)Diamond-like carbonCarbon fibersNanotechnologyThin filmComposite numberOrganic chemistryOpticsChemistryPaleontologySedimentPhysicsBiologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites