Chemical mechanical polishing on K9 glass using developed aluminum-doped monodisperse spherical ceria abrasives
Shaoping Li, Rui Ye, Junli Zhu, Zhaobo He, Ruan Chi, Yue Luo, Yukun Chen
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials scienceAbrasiveCerium oxideChemical engineeringOxideAbrasion (mechanical)Surface roughnessChemical reactionDopingBorosilicate glassCeriumIonGrindingChemical stabilityRedoxOxygenCrystal (programming language)Surface finishComposite materialMetallurgyReactivity (psychology)NanotechnologyChemical stateMineralogyInorganic chemistryAnalytical Chemistry (journal)Advanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites