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Chemical mechanical polishing on K9 glass using developed aluminum-doped monodisperse spherical ceria abrasives

Shaoping Li, Rui Ye, Junli Zhu, Zhaobo He, Ruan Chi, Yue Luo, Yukun Chen

2025Colloids and Surfaces A Physicochemical and Engineering Aspects5 citationsDOI

Topics & Concepts

PolishingChemical-mechanical planarizationMaterials scienceAbrasiveCerium oxideChemical engineeringOxideAbrasion (mechanical)Surface roughnessChemical reactionDopingBorosilicate glassCeriumIonGrindingChemical stabilityRedoxOxygenCrystal (programming language)Surface finishComposite materialMetallurgyReactivity (psychology)NanotechnologyChemical stateMineralogyInorganic chemistryAnalytical Chemistry (journal)Advanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites
Chemical mechanical polishing on K9 glass using developed aluminum-doped monodisperse spherical ceria abrasives | Litcius