Femtosecond laser processing of amorphous silicon films
Kelly T. Paula, H.-I. Lin, Florent Yang, José Dirceu Vollet‐Filho, Tian Gu, Jiangping Hu, Cléber Renato Mendonça
Topics & Concepts
Materials scienceFemtosecondAmorphous solidSiliconLaserAmorphous siliconMaterials processingOptoelectronicsNanotechnologyEngineering physicsOpticsCrystalline siliconProcess engineeringCrystallographyPhysicsChemistryEngineeringLaser Material Processing TechniquesThin-Film Transistor TechnologiesAdvanced Surface Polishing Techniques