Suppression and characterization of interface states at low-pressure-chemical-vapor-deposited SiN /III-nitride heterostructures
Kexin Deng, Xinhua Wang, Sen Huang, Haibo Yin, Jie Fan, Wen Shi, Fuqiang Guo, Wei Ke, Yingkui Zheng, Jingyuan Shi, Haojie Jiang, Wenwu Wang, Xinyu Liu
Topics & Concepts
Chemical vapor depositionMaterials scienceHeterojunctionOptoelectronicsDeep-level transient spectroscopySilicon nitrideSaturation (graph theory)SiliconCombinatoricsMathematicsGaN-based semiconductor devices and materialsSemiconductor materials and devicesGa2O3 and related materials