Growth and characterization of Rhenium Nitride coatings produced by reactive magnetron sputtering
M. Arroyave, Gilberto Bejarano, Jorge David, Jorge Morales Hernández
Topics & Concepts
X-ray photoelectron spectroscopyRheniumMaterials scienceZirconium nitrideNitrideTinSputteringSubstrate (aquarium)Sputter depositionAnalytical Chemistry (journal)Thin filmTantalum nitrideBiasingTitanium nitrideMetallurgyLayer (electronics)Chemical engineeringComposite materialNanotechnologyChemistryVoltageOrganic chemistryElectrical engineeringOceanographyEngineeringGeologyMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsDiamond and Carbon-based Materials Research