A high growth rate process of ALD CeOx with amidinato-cerium [(N-iPr-AMD)3Ce] and O3 as precursors
Liyong Du, Keyan Wang, Yinpeng Zhong, Bing Liu, Xinfang Liu, Yuqiang Ding
Topics & Concepts
CeriumMaterials scienceX-ray photoelectron spectroscopyNanostructureAtomic layer depositionChemical engineeringLimitingNanotechnologyDeposition (geology)Morphology (biology)Thin filmMetallurgyEngineeringGeneticsPaleontologyMechanical engineeringSedimentBiologyCatalytic Processes in Materials ScienceSemiconductor materials and devicesElectrocatalysts for Energy Conversion