Improved passivation performance of Al2O3 interlayer/MoOX thin films continuously grown via atomic layer deposition
Min-Ji Jeong, Jihye Park, Young Joon Cho, Hyo Sik Chang
Topics & Concepts
PassivationAtomic layer depositionHeterojunctionLayer (electronics)Materials scienceAnnealing (glass)SiliconThin filmDeposition (geology)NanotechnologyOptoelectronicsChemical engineeringComposite materialPaleontologyEngineeringBiologySedimentSilicon and Solar Cell TechnologiesSemiconductor materials and devicesSemiconductor materials and interfaces