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Achievement of sub-nanometer surface roughness of bearing steel via chemical mechanical polishing with the synergistic effect of heterocyclic compounds containing N and S

Jinwei Liu, Liang Jiang, Linmao Qian

2021Journal of Applied Electrochemistry22 citationsDOI

Topics & Concepts

BenzotriazolePolishingChemical-mechanical planarizationCorrosionMaterials scienceSurface roughnessAdsorptionSurface finishNanometreLubricationMetallurgyLayer (electronics)AbrasiveCorrosion inhibitorOxideSubstrate (aquarium)Composite materialChemistryOrganic chemistryGeologyOceanographyMetal and Thin Film MechanicsAdvanced Surface Polishing TechniquesCorrosion Behavior and Inhibition
Achievement of sub-nanometer surface roughness of bearing steel via chemical mechanical polishing with the synergistic effect of heterocyclic compounds containing N and S | Litcius