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Influence of SiO2–ZnO mixed soft abrasive on tribological behavior and polishing performance of sapphire wafer

Ziyuan Luo, Jiabin Lu, Qiusheng Yan, Da Hu, Yongze Zhou

2024Materials Science in Semiconductor Processing12 citationsDOI

Topics & Concepts

Materials scienceAbrasiveWaferSapphirePolishingTribologyChemical-mechanical planarizationMetallurgyComposite materialNanotechnologyOpticsPhysicsLaserAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization
Influence of SiO2–ZnO mixed soft abrasive on tribological behavior and polishing performance of sapphire wafer | Litcius