Nanoscale Li, Na, and K ion-conducting polyphosphazenes by atomic layer deposition
R. Blake Nuwayhid, Daniela Fontecha, Alexander C. Kozen, Angélique Jarry, Sang Bok Lee, Gary W. Rubloff, Keith Gregorczyk
Abstract
mass spectrometry for the LiPON process as key to understanding the characteristics of the APON (A = Li, Na, K) family. As expected, NaPON and LiPON share similar reaction mechanisms as their structures are strikingly similar. KPON, however, exhibits similar ALD process parameters but the resulting film composition is quite different, showing little nitrogen incorporation and more closely resembling a phosphate glass. Due to the profound difference in structure, KPON likely undergoes an entirely different reaction mechanism. This paper presents a comprehensive summary of ALD ion conducting APON films as well as a perspective that highlights the versatility of ALD chemistries as a tool for the development of novel thin film ion-conductors.