Significantly reduced intrinsic dielectric constant and loss of nano-silica by direct fluorination
Siyao Chen, Taijun He, Yongjiu Li, Xin Li, Yongbing Zhuang, Xu Wang, Yang Liu, Xiangyang Liu
Topics & Concepts
Materials scienceDielectricComposite materialComposite numberNano-Dielectric lossCeramicHigh-κ dielectricSurface modificationMicrowavePolyimidePolarizabilityChemical engineeringMoleculeOrganic chemistryLayer (electronics)OptoelectronicsQuantum mechanicsEngineeringChemistryPhysicsSilicone and Siloxane ChemistrySynthesis and properties of polymersAdvanced ceramic materials synthesis