Electrical and optical properties of amorphous silicon carbide thin films prepared by e-beam evaporation at room temperature
Jia Zheng, Lei Ye, Manduo He, Duyi He, Yuelong Huang, Jian Yu, Tao Chen
Topics & Concepts
Materials scienceAmorphous solidThin filmAmorphous siliconSilicon carbideEvaporationBand gapOptoelectronicsCarbideIon beamConductivitySiliconBeam (structure)OpticsCrystalline siliconComposite materialNanotechnologyCrystallographyChemistryPhysical chemistryThermodynamicsPhysicsThin-Film Transistor TechnologiesSemiconductor materials and devicesSilicon Nanostructures and Photoluminescence