Angstrom surface with high material removal rate for quartz glass induced by silk dissolved novel green chemical mechanical polishing
Lu Liu, Zhenyu Zhang, Chunjing Shi, Xingqiao Deng, Hongxiu Zhou, Junyuan Feng, Xiuqing Liu, Xiaoyu Liu, Wei Wen
Topics & Concepts
SlurryChemical-mechanical planarizationMaterials sciencePolishingSurface roughnessChemical engineeringAdsorptionQuartzDissolutionComposite materialSurface modificationSurface finishNanotechnologyChemistryOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchBone Tissue Engineering Materials