Enhanced temperature coefficient of resistance of VOX-based uncooled microbolometers manufactured by plasma enhanced atomic layer deposition
Unjeong Kim, Dukhwan Kim, Seokwon Lim, Yerin Jeon, Jisu Kim, J. Lee, J.H. Kim, Le Thai Duy, Hyungtak Seo
Topics & Concepts
Materials scienceAtomic layer depositionAnnealing (glass)Amorphous solidCrystallizationThermal stabilityThin filmTemperature coefficientVanadium oxideOptoelectronicsAtmospheric temperature rangeLayer (electronics)VanadiumNanotechnologyAnalytical Chemistry (journal)Composite materialChemical engineeringMetallurgyChemistryEngineeringMeteorologyPhysicsChromatographyOrganic chemistryTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsZnO doping and properties