Effect of intermolecular and intramolecular synergism on the inhibition from hybrid additives in damascene copper electrodeposition
Silin Han, Pengfei Chang, Zihan Zhou, Yunwen Wu, Ming Li, Tao Hang
Topics & Concepts
Copper interconnectIntramolecular forceImidazoleCopperElectrochemistryElectroplatingPolymerizationIntermolecular forceChemistryChemical engineeringMaterials sciencePolymer chemistryOrganic chemistryElectrodePolymerMoleculePhysical chemistryEngineeringLayer (electronics)Electrodeposition and Electroless CoatingsCorrosion Behavior and InhibitionElectrochemical Analysis and Applications