Inverted pyramid structure on monocrystalline silicon processed by wet etching after femtosecond laser machining in air and deionized water
Qingwei Wang, Peng Yao, Yueming Li, Long Jiang, Jimiao Xu, Shitong Liang, Dongkai Chu, Wanying He, Chuanzhen Huang, Hongtao Zhu, Hanlian Liu
Topics & Concepts
Monocrystalline siliconMaterials scienceFemtosecondSiliconEtching (microfabrication)LaserWaferOpticsOptoelectronicsIsotropic etchingNanotechnologyPhysicsLayer (electronics)Laser Material Processing TechniquesAdvanced Surface Polishing TechniquesSilicon Nanostructures and Photoluminescence