Inductively coupled plasma etching of bulk tungsten for MEMS applications
Yanming Xia, Zetian Wang, Song Lu, Wei Wang, Jing Chen, Shenglin Ma
Topics & Concepts
Materials scienceTungstenMicroelectromechanical systemsEtching (microfabrication)Surface roughnessSurface micromachiningSiliconMolding (decorative)Deep reactive-ion etchingMachiningDry etchingIsotropic etchingOptoelectronicsReactive-ion etchingMetallurgyNanotechnologyComposite materialFabricationLayer (electronics)MedicineAlternative medicinePathologyLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesSemiconductor materials and devices