Performance analysis and energy saving potential of air conditioning system in semiconductor cleanrooms
Jiawen Yin, Xiaohua Liu, Bowen Guan, Zhiyao Ma, Tao Zhang
Topics & Concepts
Air conditioningEnvironmental scienceOffset (computer science)HumidityFan coil unitCoefficient of performanceEnergy consumptionNuclear engineeringChilled waterChillerMeteorologyHeat exchangerEngineeringHeat pumpElectrical engineeringComputer scienceMechanical engineeringThermodynamicsPhysicsProgramming languageBuilding Energy and Comfort OptimizationHeat Transfer and OptimizationAdsorption and Cooling Systems