Design of low-friction and anti-corrosion a-C:H:SiOx films
Pingmei Yin, Xubing Wei, Lunlin Shang, Zhibin Lu, Guangan Zhang
Topics & Concepts
HexamethyldisiloxaneMaterials scienceCorrosionTribologyChemical vapor depositionSiliconMetallurgyAmorphous solidCarbon filmPlasma-enhanced chemical vapor depositionAcetyleneComposite materialThin filmNanotechnologyPlasmaChemistryQuantum mechanicsPhysicsOrganic chemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives