Accurate white light phase-shifting interferometry under PZT scanning error
Weiwei Chen, Yupeng Xiong, Junren Chen, Shanyong Chen, Junren Chen, Shanyong Chen
Topics & Concepts
White light interferometryInterferometryPhase (matter)OpticsMaterials scienceObservational errorPiezoelectricityComputer sciencePhotoelectric effectAstronomical interferometerTransducerAcousticsPhysicsMathematicsStatisticsQuantum mechanicsOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements