Strategies for damage tolerance enhancement in metal/ceramic thin films: Lessons learned from Ti/TiN
Ashwini Kumar Mishra, Hariprasad Gopalan, Marcus Hans, Christoph Kirchlechner, Jochen M. Schneider, Gerhard Dehm, Balila Nagamani Jaya
Topics & Concepts
Materials scienceTinCeramicDamage toleranceTitanium nitrideBrittlenessComposite materialFracture toughnessToughnessThin filmLayer (electronics)NitrideMetallurgyNanotechnologyComposite numberMetal and Thin Film MechanicsAdvanced ceramic materials synthesisMicrostructure and mechanical properties