Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness
Yanjie Li, Minmin You, Xiuyan Li, Bin Yang, Zude Lin, Jingquan Liu
Topics & Concepts
Materials scienceMicrostructureThin filmSputter depositionTemperature coefficientSputteringRaman spectroscopyOptoelectronicsSheet resistanceAtmospheric temperature rangeElectrical resistance and conductanceComposite materialAnalytical Chemistry (journal)OpticsNanotechnologyLayer (electronics)ChemistryPhysicsChromatographyMeteorologyGas Sensing Nanomaterials and SensorsSemiconductor materials and devicesElectronic and Structural Properties of Oxides