Litcius/Paper detail

Reactive deposition growth of highly (001)-oriented BaSi2 films by close-spaced evaporation

Kosuke O. Hara, Shuhei Takizawa, Junji Yamanaka, Noritaka Usami, Keisuke Arimoto

2020Materials Science in Semiconductor Processing22 citationsDOI

Topics & Concepts

Materials scienceElectron backscatter diffractionEvaporationAuger electron spectroscopySubstrate (aquarium)Electron beam physical vapor depositionElectron diffractionDeposition (geology)Thin filmDiffractionAnalytical Chemistry (journal)MetallurgyOpticsNanotechnologyMicrostructureChemistryPhysicsGeologySedimentNuclear physicsThermodynamicsPaleontologyOceanographyChromatographyBiologySemiconductor materials and interfacesSilicon Nanostructures and PhotoluminescenceSemiconductor materials and devices