Reactive deposition growth of highly (001)-oriented BaSi2 films by close-spaced evaporation
Kosuke O. Hara, Shuhei Takizawa, Junji Yamanaka, Noritaka Usami, Keisuke Arimoto
Topics & Concepts
Materials scienceElectron backscatter diffractionEvaporationAuger electron spectroscopySubstrate (aquarium)Electron beam physical vapor depositionElectron diffractionDeposition (geology)Thin filmDiffractionAnalytical Chemistry (journal)MetallurgyOpticsNanotechnologyMicrostructureChemistryPhysicsGeologySedimentNuclear physicsThermodynamicsPaleontologyOceanographyChromatographyBiologySemiconductor materials and interfacesSilicon Nanostructures and PhotoluminescenceSemiconductor materials and devices