Deposition of Ga2O3 thin films by liquid metal target sputtering
Ma̅rtiņš Zubkins, Viktors Vibornijs, Edvards Strods, Edgars Butanovs, Liga Bikse, Mikael Ottosson, Anders Hallén, Jevgēņijs Gabrusenoks, J. Purāns, Andris Azens
Topics & Concepts
SputteringDeposition (geology)Materials scienceThin filmMetalChemical engineeringNanotechnologyMetallurgyGeologyEngineeringSedimentPaleontologyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques