Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer
Ru Li, Zakriya Mohammed, Mahmoud Rasras, Ibrahim M. Elfadel, Daniel Choï
Topics & Concepts
Capacitive sensingCapacitanceSensitivity (control systems)Materials scienceAccelerometerMicroelectromechanical systemsComb driveStatorFootprintOptoelectronicsVoltageFabricationElectrical engineeringAcousticsElectronic engineeringEngineeringPhysicsPathologyPaleontologyQuantum mechanicsBiologyAlternative medicineMedicineElectrodeAdvanced MEMS and NEMS TechnologiesGeophysics and Sensor TechnologyAdvanced Fiber Optic Sensors