Ar gas cluster ion beam assisted XPS study of LiNbO3 Z cut surface
Е. А. Скрылева, B. R. Senatulin, Д. А. Киселев, Т. S. Ilina, D. A. Podgorny, Yu. N. Parkhomenko
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyWaferSputteringAnalytical Chemistry (journal)IonStoichiometryIrradiationIon beamSingle crystalAtomic physicsThin filmCrystallographyOptoelectronicsNuclear magnetic resonanceChemistryNanotechnologyPhysical chemistryNuclear physicsOrganic chemistryPhysicsChromatographyIon-surface interactions and analysisSemiconductor materials and devicesElectronic and Structural Properties of Oxides