Structural and electrical properties of high-performance vanadium dioxide thin layers obtained by reactive magnetron sputtering
Eduard-Nicolae Sirjita, Alexandre Boulle, Jean-Christophe Orlianges, Richard Mayet, Aurélian Crunteanu
Topics & Concepts
Electrical resistivity and conductivityMaterials scienceSputter depositionSputteringSapphireCavity magnetronAnnealing (glass)VanadiumEpitaxyThin filmOptoelectronicsHigh-power impulse magnetron sputteringMineralogyAnalytical Chemistry (journal)Composite materialMetallurgyChemistryNanotechnologyOpticsElectrical engineeringPhysicsLaserLayer (electronics)ChromatographyEngineeringTransition Metal Oxide NanomaterialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors