Electronic, Optical, and Epsilon Near-Zero Response in Magnetron-Sputtered Tantalum Oxynitride Thin Films
Maria Khalil, Aneeqa Bashir, Farman Ullah, Shahid M. Ramay, Murtaza Saleem
Topics & Concepts
Thin filmMaterials scienceTantalumBand gapSputter depositionDopingThermoelectric effectDopantOptoelectronicsAnalytical Chemistry (journal)SputteringNanotechnologyChemistryMetallurgyPhysicsThermodynamicsChromatographyMachine Learning in Materials ScienceMXene and MAX Phase MaterialsZnO doping and properties