Impact and origin of the oxide-interface traps in Al/Yb2O3/n-Si/Al on the electrical characteristics
Ayşegül Kahraman, H. Karaçalı, Ercan Yılmaz
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyAnnealing (glass)Analytical Chemistry (journal)ElectronegativityOxideSputter depositionDielectricThin filmSputteringNanotechnologyChemical engineeringMetallurgyOptoelectronicsChemistryOrganic chemistryEngineeringChromatographySemiconductor materials and devicesSemiconductor materials and interfacesAdvanced ceramic materials synthesis