Micro-milling tool mark removal mechanism by fluid jet polishing and its application for the precision manufacturing of micro-fluidic chip molds
Zili Zhang, Chunjin Wang, Jiang Guo, Chi Fai Cheung
Topics & Concepts
PolishingAbrasiveMaterials scienceJet (fluid)Chemical-mechanical planarizationMechanical engineeringProcess (computing)MachiningFluidicsChannel (broadcasting)Computer scienceMetallurgyMechanicsEngineeringPhysicsAerospace engineeringComputer networkOperating systemAdvanced Surface Polishing TechniquesErosion and Abrasive MachiningAdvanced machining processes and optimization