Nanopositioning X–Y stage with an embedded Six-DOF error compensation system based on Abbe and Bryan principles
Ya-Xiong He, Rong-Wei Lin, Ruijun Li, Jie Li, Zhenying Cheng, Qiaosheng Pan, Qiangxian Huang, Kuang–Chao Fan
Topics & Concepts
Astronomical interferometerOpticsCompensation (psychology)InterferometryLaserLaser trackerAccuracy and precisionMetrologyComputer sciencePhysicsAcousticsPsychoanalysisPsychologyQuantum mechanicsAdvanced Measurement and Metrology TechniquesAdvanced Surface Polishing TechniquesAdvanced machining processes and optimization