Thickness determination of metal multilayers by ED-XRF multivariate analysis using Monte Carlo simulated standards
Walter Giurlani, Enrico Berretti, Alessandro Lavacchi, Massimo Innocenti
Topics & Concepts
UnivariateMonte Carlo methodCalibrationMultivariate statisticsChemistryAnalytical Chemistry (journal)Focused ion beamX-ray fluorescenceCalibration curveStatisticsOpticsIonChromatographyFluorescencePhysicsMathematicsDetection limitOrganic chemistryElectron and X-Ray Spectroscopy TechniquesX-ray Spectroscopy and Fluorescence AnalysisMachine Learning in Materials Science