Structural and mechanism study on enhanced thermal stability of hydrogenated diamond-like carbon films doped with Si/O
Dong Zhang, Shuyu Li, Xiao Zuo, Peng Guo, Peiling Ke, Aiying Wang
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyRaman spectroscopyDopingThermal stabilityAnnealing (glass)Plasma-enhanced chemical vapor depositionSiliconCarbon filmAnalytical Chemistry (journal)Diamond-like carbonCarbon fibersResidual stressFourier transform infrared spectroscopyThin filmChemical engineeringNanotechnologyChemistryComposite materialComposite numberOrganic chemistryMetallurgyOptoelectronicsPhysicsOpticsEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsHigh-pressure geophysics and materials