High-Performance Waveguide-Integrated Bi<sub>2</sub>O<sub>2</sub>Se Photodetector for Si Photonic Integrated Circuits
Jianghong Wu, Maoliang Wei, Jianglong Mu, Hui Ma, Chuyu Zhong, Yuting Ye, Chunlei Sun, Bo Tang, Li‐Chun Wang, Junying Li, Xiaomin Xu, Bilu Liu, Lan Li, Hongtao Lin
Abstract
Due to the excellent electrical and optical properties and their integration capability without lattice matching requirements, low-dimensional materials have received increasing attention in silicon photonic circuits. Bi2O2Se with high carrier mobility, narrow bandgap, and good air stability is very promising for high-performance near-infrared photodetectors. Here, the chemical vapor deposition method is applied to grow Bi2O2Se onto mica, and our developed polycarbonate/polydimethylsiloxane-assisted transfer method enables the clean and intact transfer of Bi2O2Se on top of a silicon waveguide. We demonstrated the Bi2O2Se/Si waveguide integrated photodetector with a small dark current of 72.9 nA, high responsivity of 3.5 A·W–1, fast rise/decay times of 22/78 ns, and low noise-equivalent power of 15.1 pW·Hz–0.5 at an applied voltage of 2 V in the O-band for transverse electric modes. Additionally, a microring resonator is designed for enhancing light–matter interaction, resulting in a wavelength-sensitive photodetector with reduced dark current (15.3 nA at 2 V) and more than a 3-fold enhancement in responsivity at the resonance wavelength, which is suitable for spectrally resolved applications. These results promote the integration of Bi2O2Se with a silicon photonic platform and are expected to accelerate the future use of integrated photodetectors in spectroscopy, sensing, and communication applications.