Room temperature sputtered titanium oxynitride thin films: The influence of oxygen addition
Phalakorn Khwansungnoen, Surasing Chaiyakun, Tanattha Rattana
Topics & Concepts
Thin filmMaterials scienceX-ray photoelectron spectroscopyAmorphous solidAnalytical Chemistry (journal)Sputter depositionMicrostructureScanning electron microscopeSputteringTitaniumChemical engineeringNanotechnologyComposite materialMetallurgyChemistryCrystallographyOrganic chemistryEngineeringElectronic and Structural Properties of OxidesSemiconductor materials and devicesZnO doping and properties