Oxygen scavenging of HfZrO<sub>2</sub>-based capacitors for improving ferroelectric properties
Bong Ho Kim, Song‐Hyeon Kuk, Seong Kwang Kim, Seong Kwang Kim, Joon Pyo Kim, Dae‐Myeong Geum, Seung‐Hyub Baek, Sang Hyeon Kim, Sang Hyeon Kim
Abstract
We demonstrate the successful remote oxygen scavenging of HZO-based capacitors, highlighting the significant enhancement of remanent polarization, switching voltage, endurance, and retention.
Topics & Concepts
ScavengingCapacitorFerroelectricityOxygenMaterials scienceOptoelectronicsElectrical engineeringChemistryDielectricVoltageEngineeringOrganic chemistryAntioxidantFerroelectric and Negative Capacitance DevicesMXene and MAX Phase MaterialsFerroelectric and Piezoelectric Materials