MEMS gyroscopes in different operation modes: A review
Zhennan Chen, Kaichen Yan, Xiaoxu Wang, Xiaoxu Wang, Rui Li, Ao Zhang, Xiquan Wang, Xiquan Wang, Y. D. Wang, Pu Gao, Li Hua, Chao Wang, Junling Zhang, Mingyong Liu, Qianbo Lu
Topics & Concepts
GyroscopeMicroelectromechanical systemsEngineeringComputer scienceAerospace engineeringElectronic engineeringMaterials scienceNanotechnologyAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators