Preparation, characterization, and application of Nd-doped ceria-coated silica nanoparticles for chemical mechanical polishing
Jie Jiao, Yongyu Fan, Chuandong Chen, Na Fan, Lang Zhao, Jinkui Tang
Topics & Concepts
Materials sciencePolishingRaman spectroscopyWaferDopingScanning electron microscopeAnalytical Chemistry (journal)Energy-dispersive X-ray spectroscopySiliconNanoparticleSemiconductorTransmission electron microscopySpectroscopyChemical engineeringNanotechnologyComposite materialOptoelectronicsOpticsChemistryPhysicsQuantum mechanicsEngineeringChromatographyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of Oxides