HV-LDMOS Device Engineering Insights for Moving Current Filament to Enhance ESD Robustness
Nagothu Karmel Kranthi, Gianluca Boselli, Mayank Shrivastava
Abstract
In this article, a novel design approach for improving electrostatic discharge (ESD) robustness of high-voltage laterally double-diffused MOS (LDMOS) devices is presented using detailed 3-D TCAD simulations. The proposed method considers engineering both static filament and dynamic/moving current filaments in LDMOS design. Physical insights and engineering approaches for moving filaments at higher stress current levels are presented. Dynamic filament motion and its relation to n-p-n turn-on engineering with an optimum p-well profile and substrate biasing are revealed. A unique window failure in LDMOS near snapback is discussed for the first time. A detailed analysis is presented on filament width engineering by using optimum drain diffusion length (DL) and its influence on static filament-induced window failures. This approach resulted in ten-time improvement in ESD robustness for self-protecting concepts. Finally, different fundamental questions related to the origin of filament motion are explored (using 3-D TCAD) with the help of engineered LDMOS Designs.