Flexible VO2/Mica thin films with excellent phase transition properties fabricated by RF magnetron sputtering
Weibiao Ren, Wanxia Huang, Hongfu Zhu, Daoyuan Wang, Liguo Zhu, Qiwu Shi
Topics & Concepts
Materials scienceSputter depositionMicaOptoelectronicsSubstrate (aquarium)Thin filmDeposition (geology)Terahertz radiationSputteringComposite materialNanotechnologyBiologyGeologyPaleontologyOceanographySedimentTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsZnO doping and properties