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Investigation of low-cost through glass vias formation on borosilicate glass by picosecond laser-induced selective etching

Li Chen, Daquan Yu

2021Journal of Materials Science Materials in Electronics49 citationsDOI

Topics & Concepts

Borosilicate glassMaterials scienceEtching (microfabrication)LaserIsotropic etchingHydrofluoric acidFabricationPicosecondSubstrate (aquarium)Composite materialOptoelectronicsOpticsMetallurgyPathologyAlternative medicineMedicineOceanographyLayer (electronics)PhysicsGeologyLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis
Investigation of low-cost through glass vias formation on borosilicate glass by picosecond laser-induced selective etching | Litcius