<i>In situ</i> fabrication of Al surface plasmon nanoparticles by metal–organic chemical vapor deposition for enhanced performance of AlGaN deep ultraviolet detectors
You Wu, Xiaojuan Sun, Zhiming Shi, Yuping Jia, Ke Jiang, Jianwei Ben, Cuihong Kai, Yong Wang, Wei Lü, Dabing Li
Abstract
This work realized the <italic>in situ</italic> fabrication of Al surface plasmon nanoparticles by metal–organic chemical vapor deposition (MOCVD).
Topics & Concepts
Materials scienceChemical vapor depositionFabricationUltravioletNanoparticleDeposition (geology)In situMetalPlasmonOptoelectronicsNanotechnologySurface plasmon resonanceSurface plasmonMetallurgyChemistryAlternative medicinePathologySedimentOrganic chemistryBiologyPaleontologyMedicineGaN-based semiconductor devices and materialsZnO doping and propertiesGa2O3 and related materials