Hydrogenated amorphous carbon films deposited using plasma enhanced chemical vapor deposition processes
Jie Li, Heeyeop Chae
Topics & Concepts
Plasma-enhanced chemical vapor depositionAmorphous carbonChemical vapor depositionMaterials scienceCarbon fibersCarbon filmChemical engineeringAmorphous solidHydrogenThin filmNanotechnologyChemistryComposite materialOrganic chemistryComposite numberEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices