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(AlCrNbSiTi)N/TiN multilayer films designed by a hybrid coating system combining high-power impulse magnetron sputtering and cathode arc deposition

Ching-Yin Lee, Su-Jien Lin, Jien‐Wei Yeh

2023Surface and Coatings Technology18 citationsDOI

Topics & Concepts

Materials scienceHigh-power impulse magnetron sputteringSputter depositionPhysical vapor depositionTinCoatingComposite materialNanoindentationThin filmNucleationScanning electron microscopeSputteringMetallurgyNanotechnologyChemistryOrganic chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research
(AlCrNbSiTi)N/TiN multilayer films designed by a hybrid coating system combining high-power impulse magnetron sputtering and cathode arc deposition | Litcius