Diamond synthesis on Si by plasma chemical vapor deposition using microwave sheath-voltage combination plasma
Ippei Tanaka, Hiroshi Okubo, Yasunori Harada
Topics & Concepts
DiamondMaterials scienceChemical vapor depositionWaferSubstrate (aquarium)PlasmaSiliconBiasingEtching (microfabrication)Material properties of diamondSynthetic diamondAnalytical Chemistry (journal)Ion sourceMethaneOptoelectronicsNanotechnologyVoltageComposite materialLayer (electronics)ChemistryPhysicsOceanographyGeologyOrganic chemistryQuantum mechanicsChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites