A novel hypergraph convolution network for wafer defect patterns identification based on an unbalanced dataset
Yuxi Xie, Shaofan Li, Chuan Wu, Zhipeng Lai, Miao Su
Topics & Concepts
Convolution (computer science)Wafer fabricationWaferIdentification (biology)Computer sciencePattern recognition (psychology)Artificial intelligenceData miningFeature (linguistics)Feature extractionSemiconductor device fabricationConvolutional neural networkAlgorithmProcess (computing)Artificial neural networkEngineeringPhilosophyOperating systemBiologyElectrical engineeringBotanyLinguisticsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques