Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films
Meng Liu, Yong Yang, Quan Mao, Yuquan Wei, Yajie Li, Ningning Ma, Huan Liu, Xuejian Liu, Zhengren Huang
Topics & Concepts
Materials scienceSputter depositionAmorphous solidSputteringRadio frequencyCoatingComposite materialSubstrate (aquarium)OptoelectronicsCavity magnetronBiasingRF power amplifierThin filmVoltageNanotechnologyElectrical engineeringCMOSCrystallographyComputer scienceTelecommunicationsOceanographyAmplifierGeologyChemistryEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchCopper Interconnects and Reliability