Investigation of β-Ga2O3 thin films grown on epi-GaN/sapphire(0001) substrates by low pressure MOCVD
Tao Zhang, Yifan Li, Yachao Zhang, Qian Feng, Jing Ning, Chunfu Zhang, Jincheng Zhang, Yue Hao
Topics & Concepts
SapphireMetalorganic vapour phase epitaxyMaterials scienceX-ray photoelectron spectroscopyEpitaxyFull width at half maximumCrystal (programming language)High-resolution transmission electron microscopyThin filmAnalytical Chemistry (journal)Morphology (biology)Single crystalCrystallographyNanotechnologyTransmission electron microscopyChemistryOptoelectronicsOpticsChemical engineeringLaserComputer scienceGeneticsEngineeringLayer (electronics)PhysicsBiologyProgramming languageChromatographyGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials