Mechanical chemical polishing of large-size single-crystal diamond substrates with a sol-gel polishing tool
Hailang Wen, Jing Lü, Shuai Xu, Ning Yan
Topics & Concepts
AbrasivePolishingMaterials scienceDiamondChemical-mechanical planarizationSurface roughnessMetallurgyAmorphous solidCrystal (programming language)Composite materialCrystallographyChemistryComputer scienceProgramming languageDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites